AMC monitoring device "SAM-S"
A single system can monitor up to three types of gases (NH3, HF, HCl)!
The "SAM-S" is an AMC monitoring device that integrates a cavity ring-down spectroscopy (CRDS) analysis system with a high-performance sampling system. It enables high gas flow rates, minimizes cross-port contamination, and quickly reports accurate AMC concentrations. Additionally, it can be configured to sample from up to 16 different locations and, when combined with Picarro's SI3401 gas analyzer, can measure ammonia (NH3), hydrogen fluoride (HF), and hydrogen chloride (HCl). 【Features】 ■ Inline AMC monitoring system ■ Measurement of NH3, HF, and HCl at ppt levels ■ Response time in seconds ■ Minimal setup time ■ Monitoring multiple locations within a clean room *For more details, please refer to the PDF document or feel free to contact us.
- 企業：アークステーション
- 価格：Other
